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    <AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000115"/>
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    <!-- http://purl.obolibrary.org/obo/CHMO_0001356 -->

    <Class rdf:about="http://purl.obolibrary.org/obo/CHMO_0001356">
        <rdfs:label>physical vapour deposition</rdfs:label>
    </Class>
    


    <!-- http://purl.obolibrary.org/obo/CHMO_0001360 -->

    <Class rdf:about="http://purl.obolibrary.org/obo/CHMO_0001360">
        <rdfs:label>thermal evaporation</rdfs:label>
        <rdfs:subClassOf rdf:resource="http://purl.obolibrary.org/obo/CHMO_0001356"/>
        <oboInOwl:id>CHMO:0001360</oboInOwl:id>
        <oboInOwl:hasExactSynonym>evaporative deposition)</oboInOwl:hasExactSynonym>
        <oboInOwl:hasExactSynonym>vacuum thermal evporation</oboInOwl:hasExactSynonym>
        <oboInOwl:hasExactSynonym>vacuum condensation</oboInOwl:hasExactSynonym>
        <oboInOwl:hasExactSynonym>thermal deposition</oboInOwl:hasExactSynonym>
        <ns3:IAO_0000115>A synthesis technique where the material to be deposited is heated until evaporation in a vacuum (&lt;10^{-4} Pa) and eventually deposits as a thin film by condensing on a (cold) substrate.</ns3:IAO_0000115>
        <oboInOwl:hasExactSynonym>filament evaporation</oboInOwl:hasExactSynonym>
        <oboInOwl:hasExactSynonym>TE</oboInOwl:hasExactSynonym>
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