electron microscopy high-resolution electron microscopy high resolution electron microscopy high-resolution EM CHMO:0002329 https://orcid.org/0000-0001-5985-7429 HREM high resolution EM 2009-09-02T01:04:21Z Microscopy where the specimen bombarded with a finely focused (<10 nm diameter) electron beam with an acceleration voltage 50–150 kV under vacuum. The specimen is tilted such that a low-order zone axis is closely parallel to the incident beam, and columns of atoms are viewed end-on by the beam. The interaction of the electrons with the specimen produces transmitted, secondary, backscattered and diffracted electrons and characteristic X-rays which are detected. HREM imaging is used to explore crystal structures and imperfections on the atomic scale.